12. Ion Implantation and Annealing - Analytic Models and Monte Carlo
JUDY HOYT: So before we start with today's formal lecture, there's a couple of things I want to talk about. One is the schedule, which I have shown up here. And you'll notice, or if you remember, I've actually shifted around one of the lectures. Here we are today, I think October 19. And we're supposed to have this lecture on the SUPREM-IV process simulator. I decided I wanted to do that lecture later, primarily because I want to have talked about transient enhanced diffusion and those effects. A lot of the examples I show and how to use SUPREM relate to transient enhanced diffusion. And I realized I hadn't really-- I wouldn't have introduced it. So we're going to have instead the ion implantation lectures. There's four on ion implantation, two of those are on TED, and then we'll do that lecture. And as I mentioned also because of the Red Sox game last night, I don't have homework number 4 ready to go out to you yet. And so we c...
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