7. Oxidation and the SiSiO2 Interface. 2D Effects, Doping Effects, Point Defect
JUDY HOYT: The curvature of the surface, and they want to look at the oxidation rate as a function of how curved the surface was. So this is a top view or a bird's eye view here of his structure in part A. But look on slide 3. Part B you're looking at a side view here. So you can see he had etched this cylindrical structure in the top. It's got a circular pattern. After preparing this surface, he then put it in the furnace and grew this thermal oxide on all those free surfaces, which is shown here in blue. That's the silicon dioxide. So that was a real experiment. And then, just like we saw in the previous photo from Marcus and Shang, he put down-- he deposited polycrystalline silicon, and that's simply used for contrast during the SEM analysis and to protect the oxide. So he has got this polysilicon over everything, so from a top view all you would see is the poly. And then to reveal this oxide and what it looks like looking down, he then lapped or po...