17. Thin Film Deposition and Epitaxy - Introduction to CVD, Si Epitaxial Growth
JUDY HOYT: In a polycrystalline state, or it can be grown epitaxially, which epitaxially-- "epitaxial" is a Greek word, which means, having the same crystal structure as the substrate. So silicon itself can be deposited. And we'll talk about that in the next couple of lectures. So we're going to talk about the methods, the equipment, and some basic concepts used to deposit or grow the-- these thin films. So let's just go back to a picture that I think I showed earlier in the course. But it's a cross-section view of, say, devices in a CMOS chip. And we've got our silicon substrate down here at the bottom. We've talked a lot about how to create n-wells and p-wells by ion planting, and diffusing, and the source drains, and all that. But there are a lot of other films here besides silicon substrate. So everything that's in a color, other than white here, is some other film. For example, here, we might have copper that's used in the in...